Hayato Kitagawa

→ Search for Hayato Kitagawa in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

5:30 PM - 5:45 PM

△ [16p-A403-16] Interfacial Analysis of Low Temperature Deposited CVD-SiO₂ for Direct Bonding

〇Hayato Kitagawa¹, Koki Onishi¹, Tomoya Iwata¹, Junya Fuse¹, Akira Uedono², Fumihiro Inoue¹ (1.Yokokoku Univ., 2.Univ. of Tukuba)