Yubin DENG

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

6:30 PM - 6:45 PM

▲ [16p-A403-20] Cu diffusion barrier property evaluation of 1-nm-thick PVD-Co(W) films by time-lag method

〇(D)Yubin DENG¹, Takeshi Momose¹, Yukihiro Shimogaki¹ (1.The Univ. of Tokyo)