Hirotaka Yamada

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 6:45 PM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[16p-A403-1~20] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:00 PM - 3:15 PM

[16p-A403-7] Energy-efficient Annealing Process of HfO₂-based Ferroelectric Capacitor using UV-LED for Green Manufacturing

〇Hirotaka Yamada^1,2, Satoru Furue¹, Takehiko Yokomori¹, Yuki Itoya², Takuya Saraya², Toshiro Hiramoto², Masaharu Kobayashi^2,3 (1.Ushio Inc., 2.IIS, Univ. of Tokyo, 3.d.lab, Univ. of Tokyo)