Guo Chen

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM A408 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[16p-A408-1~18] 6.2 Carbon-based thin films

1:00 PM - 1:15 PM

▼ [16p-A408-1] Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers

〇(D)Guo Chen¹, Zilong Zhang¹, Liwen Sang¹, Yasuo Koide¹, Satoshi Koizumi¹, Meiyong Liao¹ (1.NIMS)