Mirai Iimori

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:00 PM A502 (Building No. 6)

Oral presentation
| 3 Optics and Photonics
| 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[16p-A502-1~14] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

2:15 PM - 2:30 PM

△ [16p-A502-6] Measurement of the out-of-plane motion in MEMS devices using differential interference contrast microscopy with phase-shifting corrections

〇Mirai Iimori¹, Ya Zhang¹ (1.Tokyo Univ. of Agri. &Techno.)