Hajime Saito

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

5:15 PM - 5:30 PM

[16p-B508-16] Preparation and evaluation of GeO₂film by two-step oxidation

〇(M1)Hajime Saito¹, Yuta Tsuchiya¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)