Hiroshi Yasuda

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:00 PM - 5:45 PM B508 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-B508-1~17] 13.3 Insulator technology

2:15 PM - 2:30 PM

[16p-B508-5] Stabilization of ferroelectric phase in HfO₂ thin films by applying mechanical strain during annealing process

〇Hiroshi Yasuda¹, Takashi Onaya², Koji Kita^1,2 (1.School of Eng., The Univ. of Tokyo, 2.Graduate School of Frontier Sci., The Univ. of Tokyo)