Soma Kato

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 4:45 PM E102 (Building No. 12)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16p-E102-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

1:30 PM - 1:45 PM

[16p-E102-1] Growth temperature dependence of Ga₂O₃ growth on ScAlMgO₄ by mist CVD

〇Soma Kato¹, Syuhei Yamashita¹, Yuichi Wada¹, Hitoshi Takane³, Yuto Yamafuji¹, Junjiro Kikawa¹, Makoto Matsukura⁴, Takahiro Kojima⁴, Takashi Shinohe⁵, Momoko Deura², Kentaro Kaneko³, Tsutomu Araki¹ (1.Ritsumeikan Univ., 2.R-GIRO, 3.ROST, 4.OXIDE Co., 5.FLOSFIA Inc.)