Shuji Ikeda

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)

Symposium (Oral)
| Symposium
| Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

[16p-E302-1~10] Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

4:50 PM - 5:20 PM

[16p-E302-8] IoB brings drastic change on Semiconductor Manufacturing Technology

〇Shuji Ikeda¹ (1.tei Solutions)