The 70th JSAP Spring Meeting 2023

Hiroyuki AKINAGA

Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 6:30 PM E302 (Building No. 12)

  • Symposium (Oral)
  • | Symposium
  • | Ultimate Laboratory Automation: Semiconductor Giga Fab as a Giant Robotic Experimenter?

5:20 PM - 6:20 PM

Hiroyuki AKINAGA1, Takumi MIKAWA2, Masashi AONO3, Toshihide KOBAYASHI4, Yoichi MOTOORI5, Hideharu AMANO6, Taro HITOSUGI7, Hiroyuki FUJITA8, Koichi TAKAHASHI9, Shuji IKEDA10 (1.AIST, 2.SCREEN Semicond., 3.Amoeba Energy, 4.Sangyo Times, 5.Murata Machinery, 6.Keio Univ., 7.Univ. Tokyo, 8.TCU, 9.RIKEN, 10.tei solutions)