Kotaro Kusunoki

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA03 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 3:30 PM

[16p-PA03-1] Vertical Cu-MIC poly-Ge TFT on a glass substrate

〇Kotaro Kusunoki¹, Syo Suzuki¹, Kosei Suzuki¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)