Haruto Saito

→ Search for Haruto Saito in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA03 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 3:30 PM

[16p-PA03-2] Formation of β-FeSi₂ NDs by SiH₄-Exposure to Fe-NDs

〇Haruto Saito¹, Katsunori Makihara¹, Wang Zilu¹, Noriyuki Taoka¹, Akio Ohta¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)

1:30 PM - 3:30 PM

[16p-PA03-3] Study on Silicidation Reaction of Ultrathin Fe-Films with SiH₄

〇Haruto Saito¹, makihara katsunori¹, Wang Zilu¹, Noriyuki Taoka¹, Akio Ohta¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)