Ryo Nakashima

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA03 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 3:30 PM

[16p-PA03-4] Investigation of Dry Etching Technique on the Surface of POFs for Sensor Applications

〇Ryo Nakashima¹, Takuto Nakanishi¹, Heeyoung Lee², Yosuke Mizuno³, Daisuke Yamane¹ (1.Rits. Univ., 2.SIT, 3.YNU)