Yoshiyuki Watanabe

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 3:30 PM PA03 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-PA03-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 3:30 PM

[16p-PA03-6] MEMS Rogowski Coil Current Sensor with Radially Formed Spiral Return Coil

〇Yoshiyuki Watanabe¹, Mutsuto Kato¹, Toru Yahagi¹, Hiroki Murayama¹, Naoya Yamada¹, Kazuki Yoshida¹, Kenichi Yoshida², Kenichi Maehara², Makiko Noma², kazuyuki Sashida², Shoma Hoki², Katsuya Ikeda², Toshiyuki Takemori² (1.Yamagata Res. Inst. Tech., 2.Shindengen)

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