Tatsuki Takenaka

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:30 AM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-A205-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:00 AM - 9:15 AM

[17a-A205-1] Effects of Nitrogen Pressure and Substrate Temperature on Mechanical Properties of Pulsed Laser Deposited SiCN Thin Films

〇(B)Tatsuki Takenaka¹, Yoshifumi Aoi¹, Masateru Nose² (1.Ryukoku Univ., 2.Toyama Univ.)