Yuki Oba

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:30 AM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-A205-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:15 AM - 9:30 AM

[17a-A205-2] Preparation and Characterization of SiCN Thin Films by Electron Cyclotron Resonance (ECR) Plasma Sputtering

〇(B)Yuki Oba¹, Kimihide Ito¹, Masateru Nose², Yoshifumi Aoi¹ (1.Ryukoku Univ., 2.Toyama Univ.)