Mizuki Ueno

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:30 AM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-A205-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:30 AM - 10:45 AM

△ [17a-A205-6] Impact of hydrogen dilution on DLC film formation
by intermediate-pressure narrow gap plasma CVD

〇Mizuki Ueno¹, Kazuki Ishizaki¹, Hiroaki Kakiuchi¹, Hiromasa Ohmi¹ (1.Osaka Univ.)