Tatsuhiko Higashiki

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:30 AM - 12:05 PM A402 (Building No. 6)

Symposium (Oral)
| Symposium
| 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

[17a-A402-1~10] 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

10:15 AM - 10:30 AM

[17a-A402-3] The history and future of lithography development told by a legend

〇Tatsuhiko Higashiki¹ (1.KIOXIA)