Akira Kagoshima

→ Search for Akira Kagoshima in Google Scholar

Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:30 AM - 12:05 PM A402 (Building No. 6)

Symposium (Oral)
| Symposium
| 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

[17a-A402-1~10] 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

10:30 AM - 10:45 AM

[17a-A402-4] Microwave ECR etching equipment system development and the real pleasure of it.

〇Akira Kagoshima¹ (1.Hitachi High-Tech)