Junichi Hattori

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:45 AM A403 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[17a-A403-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

9:15 AM - 9:30 AM

[17a-A403-2] Relationship between electron velocity overshoot effects and gate length in Si nanosheet FETs

〇Junichi Hattori¹, Koichi Fukuda¹, Tsutomu Ikegami¹, Yoshihiro Hayashi¹ (1.AIST)