Atsushi Kobayashi

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:45 AM B401 (Building No. 2)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[17a-B401-1~9] 15.4 III-V-group nitride crystals

9:45 AM - 10:00 AM

[17a-B401-4] Characteristics of epitaxial ScAlN films grown by sputtering

〇Atsushi Kobayashi¹, Takuya Maeda², Yoshio Honda³, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS, The Univ. of Tokyo, 2.EEIS, The Univ. of Tokyo, 3.Nagoya Univ.)

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