Hiroyasu Kato

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 12:00 PM D419 (Building No. 11)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[17a-D419-1~12] 6.4 Thin films and New materials

9:30 AM - 9:45 AM

[17a-D419-3] Improvement of Inhomogeneity in Low Refractive Index Al₂O₃ Optical Thin Films by Sputtering and Electron Beam Evaporation

〇(M2)Hiroyasu Kato¹, Takayuki Matsudaira², Hiroshi Murotani¹ (1.Grad Sch.of Eng.,Tokai Univ., 2.SHINCRON Co.,Ltd)