9:30 AM - 11:30 AM [17a-PB01-19] Fabrication and characterization of Ca-doped In2O3 TFTs using CaO and CaF2 as co-sputtering material 〇(M1)Ayumu Nodera1, Shun Mori1, Shinya Aikawa1 (1.Kogakuin Univ.)