Atsuya Oikawa

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:30 AM - 11:30 AM PB01 (Poster)

Poster presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:30 AM - 11:30 AM

[17a-PB01-4] Growth of Ga₂O₃ thin film by sputtering method using powder target

〇Atsuya Oikawa¹, Miki Fujita¹, Daiki Nagatsuyu², Rintaro Matsumoto², Toshiki Makimoto² (1.NIT, Ichinoseki College, 2.Waseda Univ.)