Ryota Ochi

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 6:00 PM A301 (Building No. 6)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[17p-A301-1~18] 13.7 Compound and power devices, process technology and characterization

5:00 PM - 5:15 PM

[17p-A301-15] Effects of PEC etching for fermi-level pinning in AlGaN/GaN HEMTs

〇Ryota Ochi¹, Takuya Togashi¹, Yoshito Osawa¹, Fumimasa Horikiri², Noboru Fukuhara², Masamichi Akazawa¹, Taketomo Sato¹ (1.RCIQE, 2.Sumitomo Chemical)

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