Takumi Numata

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 4:45 PM A405 (Building No. 6)

Oral presentation
| 3 Optics and Photonics
| 3.6 Laser processing (formerly 3.7)

[17p-A405-1~14] 3.6 Laser processing (formerly 3.7)

2:30 PM - 2:45 PM

△ [17p-A405-7] Investigation of excimer laser annealing process for room temperature solid phase crystallization of impurity-doped β-Ga₂O₃ thin films for p/n semiconductivity control

〇Takumi Numata¹, Ryoya Kai¹, Tomoaki Oga¹, Satoru Kaneko^1,2, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)