Keitaro Naito

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:00 PM B414 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[17p-B414-1~15] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

4:15 PM - 4:30 PM

[17p-B414-13] Carrier Mobility Modeling for MONOS SiN Layer Considering Electric Field and Temperature Dependence

〇Keitaro Naito¹, Hiroshi Takeda¹, Takayuki Okura¹, Junji Shimokawa¹, Muneyuki Tsuda¹, Hiroyuki Yamashita¹, Keiichi Sawa¹, Takashi Kurusu¹ (1.KIOXIA Corporation)

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