Tomoya Nagao

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:30 PM - 3:30 PM PA06 (Poster)

Poster presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[17p-PA06-1~14] 6.1 Ferroelectric thin films

1:30 PM - 3:30 PM

[17p-PA06-14] Synthesis of c-axis oriented AlN thin film on titanium cantilever for high output of piezoelectric vibratory energy harvesters

〇(B)Tomoya Nagao¹, H. H. Nguyen², Hiroki Kuwano², Hiroyuki Oguchi¹ (1.Shibaura Tech, 2.Tohoku Univ. NICHe)