Yuichi Haruyama

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:30 PM - 3:30 PM PA07 (Poster)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[17p-PA07-1~9] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[17p-PA07-6] Selective Etching of Hydrogen-Free Diamond-Like Carbon Films on Atomic Hydrogen Exposure

〇Yuichi Haruyama¹, Daiki Morimoto¹, Akira Heya², Koji Sumitomo², Noriaki Toyoda², Seigo Ito² (1.LASTI Univ. of Hyogo, 2.Grad. Sch. of Eng. Univ. of Hyogo)

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