Kenji Hirata

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:30 PM - 3:30 PM PB01 (Poster)

Poster presentation
| 9 Applied Materials Science
| 9.1 Dielectrics, ferroelectrics

[17p-PB01-1~4] 9.1 Dielectrics, ferroelectrics

1:30 PM - 3:30 PM

[17p-PB01-2] Preparation of AlN thin films with simultaneous addition of Mg and W

〇Kenji Hirata¹, Tomoya Toyofuku², Hiroshi Yamada^1,2, Sri Ayu Anggraini¹, Kodai Niitsu³, Masato Uehara^1,2, Morito Akiyama¹ (1.AIST, 2.Kyushu Univ., 3.NIMS)

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