Quan Shi

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Speaker, Author, Co-Author

Sat. Mar 18, 2023 9:00 AM - 11:30 AM A408 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[18a-A408-1~9] 8.3 Plasma nanotechnology

11:15 AM - 11:30 AM

▼ [18a-A408-9] Nano/micro-structures formation on various semiconductors by argon plasma irradiation assisted with molybdenum impurity

〇(PC)Quan Shi¹, Shin Kajita², Hirohiko Tanaka³, Ryo Yasuhara¹, Noriyasu Ohno³, Hiyori Uehara¹ (1.NIFS, 2.Univ. of Tokyo, 3.Nagoya Univ.)