Taegyu Woo

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Speaker, Author, Co-Author

Sat. Mar 18, 2023 9:30 AM - 11:45 AM D215 (Building No. 11)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[18a-D215-1~8] 1.3 Novel technologies and interdisciplinary engineering

10:45 AM - 11:00 AM

[18a-D215-5] Fabrication and Characterization of Heat Dissipation Structure Using Al₂O₃ Nano-Structure by ALD

〇Taegyu Woo¹, Yuuki Tsuji¹, Syohei Lin¹, Chishu Mori¹, Yudai Isahaya¹, Joji Maeda¹, Taro Itatani², Takeru Amano² (1.Tokyo Univ. of Science, 2.AIST)