Eisuke Yokoyama

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Speaker, Author, Co-Author

Sat. Mar 18, 2023 1:00 PM - 2:30 PM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[18p-A205-1~5] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

1:45 PM - 2:00 PM

[18p-A205-3] Discharge-pulse designs and Optical Emission Spectroscopy in Intermittent Deep Oscillation Magnetron Sputtering

〇Eisuke Yokoyama¹, Tomoki Nagai¹, Kaita Tsutsui¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

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