Takefumi Kimura

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Speaker, Author, Co-Author

Sat. Mar 18, 2023 1:00 PM - 4:30 PM A401 (Building No. 6)

Oral presentation
| 23 Joint Session N "Informatics"
| 23.1 Joint Session N "Informatics"

[18p-A401-1~13] 23.1 Joint Session N "Informatics"

4:00 PM - 4:15 PM

[18p-A401-12] Optimization of temperature coefficient of resistance in Cr-Si-N thin films using machine learning

〇(M2)Takefumi Kimura¹, Ayaka Aida², Hiroyuki Hara², Ryo Akiike², Masami Mesuda², Shigeru Kobayashi¹, Ryo Tamura^3,4, Ryota Shimizu¹, Taro Hitosugi^1,5 (1.Tokyo Tech, 2.TOSOH CORPORATION, 3.NIMS, 4.Univ. Tokyo FS, 5.Univ. Tokyo)

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