The 70th JSAP Spring Meeting 2023

Exhibitors

8 results  (1 - 8)

[B-5] HTL Co. Japan Ltd

・Atomic Layer Deposition Tools/ GEMStar XT/XT-P: Benchtop ALD platform. Possible deposition materials are oxides such as TiO2 and SnO2, Nitride of TiN and metals such as Pt and Ru. ・Compact Thermal...