The 70th JSAP Spring Meeting 2023

Katsuhisa Murakami

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Chairperson, etc.

Wed. Mar 15, 2023 1:30 PM - 4:45 PM D209 (Building No. 11)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.2 Applications and technologies of electron beams

[15p-D209-1~12] 7.2 Applications and technologies of electron beams

Katsuhisa Murakami(AIST), Takafumi Ishida(Nagoya University)