Masato Sone(Tokyo Tech), Reo Kometani(Univ. of Tokyo)
Reo Kometani
Chairperson, etc.
Thu. Mar 16, 2023 9:00 AM - 11:30 AM B410 (Building No. 2)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si processing /Si based thin film / MEMS / Equipment technology