The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15a-A408-1~10] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 9:00 AM - 11:30 AM A408 (Building No. 6)

Hideo Isshiki(UEC), Hiroshi Naragino(Kyushu Univ.)

9:45 AM - 10:00 AM

[15a-A408-4] Formation of diamond-based electronic tongue sensors by large-area hot-filament CVD and their evaluation of in-plane uniformity

〇Shinya Ohmagari1, Hiroya Nakahara1, Nobutomo Morita1, Kenshin Takemura1, Wataru Iwasaki1 (1.AIST SSRC)

Keywords:electronic tongue, diamond, boron