[15a-B401-1~7] 15.4 III-V-group nitride crystals

[15a-B401-1] Shape homogenization of GaInN buffer in nanocolumn crystals by the changed nitrogen RF power

〇Hiromi Akagawa¹, Jumpei Yamada^2,3, Tomohiro Yamaguchi¹, Rie Togashi^2,3, Takeyoshi Onuma¹, Ichirou Nomura^2,3, Tohru Honda¹, Katsumi Kishino^2,3 (1.Kogakuin Univ., 2.Sophia Nanotech Center, 3.Sophia Univ.)

Keywords:semiconductor, nanocolumn, MBE