[15a-D209-1~5] 7.3 Micro/Nano patterning and fabrication

[15a-D209-5] Feasibility of Stereophonic Parabolic-Mirror Projection-Exposure Using a Flat Reticle

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

Keywords:stereophonic projection lithography, parabolic mirror, lithography on curved surfaces

Although patterns on a curved reticle were successfully replicated on specimens with the same surface profiles, the necessity of curved reticles may become a fatal obstacle of the new stereophonic lithography. It is thought that fabrication of curved reticles is not easy. For this reason, it was investigated whether patterns were replicable on gently curved surfaces using conventional flat reticles. It was clarified experimentally that 2-mm pitch lattice patterns with 200-µm width on a flat reticle were replicable on both concave and convex specimen surfaces. Patterning on gently curved surfaces using conventional flat reticles is prospective.