[15a-D511-1~11] 15.7 Crystal characterization, impurities and crystal defects

△ [15a-D511-3] ANN potential analysis on clustering of self-interstitial atoms in Si crystal

〇Kazuki Yamanaka¹, Tatsuya Yokoi², Eiji Kamiyama³, Yusuke Noda³, Koji Sueoka³ (1.Graduate School of Engineering, Okayama pref Univ., 2.Graduate School of Engineering, Nagoya Univ., 3.Faculty of Computer Science and Systems Engineering, Okayama pref Univ.)

Keywords:self interstitial atoms, ANN potential