The 70th JSAP Spring Meeting 2023

Presentation information

Poster presentation

17 Nanocarbon Technology » 17 Nanocarbon Technology (Poster)

[15a-PA01-1~56] 17 Nanocarbon Technology (Poster)

Wed. Mar 15, 2023 9:30 AM - 11:30 AM PA01 (Poster)

9:30 AM - 11:30 AM

[15a-PA01-44] Identification of the monolayer thickness difference in a thick film of layered materials

Yoshiaki Hattori1, Takashi Taniguchi2, Kenji Watanabe2, Masatoshi Kitamura1 (1.Kobe Univ., 2.NIMS)

Keywords:hBN, graphite

層状材料を複層化させたデバイスでは,比較的厚い30 nm程度の六方晶窒化ホウ素や数ナノのグラファイトが利用されることがある.それらは,一般的に90 nmや300 nmのSiO2膜付きのシリコン基板に転写し,干渉効果を利用して,光学顕微鏡により目的のフレークを得るが,層数が増えると数層分の厚さの違いを認知するのは困難になる.本研究では,理想的な平坦で厚いフレークを得るために最適なSiO2膜の厚さを検討した.

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