[15p-A301-1~13] 15.6 Group IV Compound Semiconductors (SiC)

[15p-A301-2] Effect of viscosity on flow distribution, temperature distribution and growth rate in SiC solution growth

〇Juanheng Li¹, Yifan Dang¹, Masato Ota¹, Kentaro Kutsukake^2,3, Harada Shunta^1,2, Tagawa Miho^1,2, Toru Ujihara^1,2 (1.Grad. Sch. Eng. Nagoya Univ., 2.IMaSS Nagoya Univ., 3.AIP RIKEN)

Keywords:viscosity