[15p-A402-1~9] 【Open Symposium】How can Applied Physics accelerate the green transformation for the sustainable future?

[15p-A402-4] Academic Challenges for Green Semiconductor Manufacturing:The Moving Away from Massive Power Consumption Industries

〇Masaru Hori¹ (1.Nagoya Univ.)

Keywords:semiconductor, plasma

Along with the development of ultra-low power devices, increasing power consumption in device manufacturing has become a major issue as we move toward carbon neutrality by 2050. Since 1/3 to 1/2 of the power used in semiconductor factories is used in plasma processes, energy conservation of plasma-based manufacturing equipment and processes is extremely important. This presentation will discuss the need for academic approaches to green semiconductor manufacturing in order to move away from mass power-consuming industries.