1:15 PM - 1:30 PM
[15p-A408-2] Chemical bonding evaluation of DLC films using HiPIMS and high frequency HiPIMS methods
Keywords:diamond-like carbon, X-ray photoelectron spectroscopy
We have been developing a new HiPIMS (High-Power Impulse Magnetron Sputtering) method, HF (High Frequency)-HiPIMS power supply, for further functionalization of thin films. In this study, we report on the chemical bonding of DLC (Diamond-Like Carbon) films using conventional HiPIMS and HF-HiPIMS methods. DLC films deposited by HF-HiPIMS method increased diamond bonding compared to those deposited by conventional HiPIMS method. Therefore, the effectiveness of the HF-HiPIMS method was confirmed.