The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

1:30 PM - 1:45 PM

[15p-A408-3] Relationship between film density and carbon bonding in DLC films using high frequency HiPIMS method

〇(DC)Hiroyuki Fukue1, Tatsuyuki Nakatani1, Tadayuki Okano2, Masahide Kuroiwa2, Shinsuke Kunitsugu3, Susumu Takabayashi4, Hiroki Oota5, Ken Yonezawa5,1 (1.Okayama Univ. of Sci., 2.Tokyo Electronics Co., Ltd., 3.Ind. Technol. Cent. Okayama Pref., 4.National Inst. Technol., Ariake College, 5.Kenix Corporation)

Keywords:diamond-like carbon, Raman spectroscopy

We have been developing a new HiPIMS (High-Power Impulse Magnetron Sputtering) method, HF (High Frequency)-HiPIMS power supply, for further functionalization of thin films. In this study, we report on the relationship between film density and carbon bonding in DLC (Diamond-Like Carbon) films using this HF-HiPIMS method. Carbon bonding was measured by Raman spectroscopy, and five waveforms were separated by Voigt functions. A D-band decreased with increasing film density. Thus, the increase in film density suggests that the incident ions are strong.