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△ [15p-A408-3] Relationship between film density and carbon bonding in DLC films using high frequency HiPIMS method
Keywords:diamond-like carbon, Raman spectroscopy
We have been developing a new HiPIMS (High-Power Impulse Magnetron Sputtering) method, HF (High Frequency)-HiPIMS power supply, for further functionalization of thin films. In this study, we report on the relationship between film density and carbon bonding in DLC (Diamond-Like Carbon) films using this HF-HiPIMS method. Carbon bonding was measured by Raman spectroscopy, and five waveforms were separated by Voigt functions. A D-band decreased with increasing film density. Thus, the increase in film density suggests that the incident ions are strong.
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