The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

1:45 PM - 2:00 PM

[15p-A408-4] Thermal decomposition process of highly-hydrogenated diamond-like carbon films (2)

〇(M1)Daisuke Niwa1, Tomohiro Mishima1, Koji Nakanishi1, Naoki Fukumuro2, Tsuneo Suzuki3, Kazuhiro Kanda1 (1.LASTI,Univ.Hyogo, 2.Eng.Univ.Hyogo, 3.Nagaoka.Univ.Tech)

Keywords:highly-hydrogenated diamond-like carbon films, Thermal decomposition

Previous studies of highly-hydrogenated diamond-like carbon (DLC) films with hydrogen content exceeding 40% have shown that hydrogen desorption from highly-hydrogenated DLC films occurs at around 360°C and hydrocarbon desorption at around 480°C as a result of temperature increase. In this study, we investigated the compositional and structural changes of highly-hydrogenated DLC films with increasing temperature by Rutherford backscattering and elastic recoil scattering spectroscopy (RBS/ERDA) and X-ray absorption near edge structure (XANES) and discussed the thermal decomposition process. The results show that the hydrogen content in RBS/ERDA decreases between 300°C and 400°C and between 450°C and 550°C. The hydrogen content in RBS/ERDA decreases between 300°C and 400°C, and between 450°C and 550°C, respectively. In XANES, the percentage of carbon atoms in sp2 hybrid orbitals increases after desorption. From this result, it was found that the desorption process is consistent with the temperature rise desorption experiment and that the carbon atoms are recombined as double bonds after desorption.

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