The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

2:00 PM - 2:15 PM

[15p-A408-5] Nano-size Controlled Doping into Diamond-like Carbon

Susumu Takabayashi1, Hisashi Koga1 (1.National Institute of Technology, Ariake College)

Keywords:Diamond-like carbon, Photoemission-assisted Townsend discharge, Dopng


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