Hiroyuki Fukue

→ Search for Hiroyuki Fukue in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

1:15 PM - 1:30 PM

[15p-A408-2] Chemical bonding evaluation of DLC films using HiPIMS and high frequency HiPIMS methods

〇(DC)Hiroyuki Fukue¹, Tatsuyuki Nakatani¹, Tadayuki Okano², Masahide Kuroiwa², Shinsuke Kunitsugu³, Susumu Takabayashi⁴, Hiroki Oota⁵, Ken Yonezawa^5,1 (1.Okayama Univ. of Sci., 2.Tokyo Electronics Co., Ltd., 3.Ind. Technol. Cent. Okayama Pref., 4.National Inst. Technol., Ariake College, 5.Kenix Corporation)

1:30 PM - 1:45 PM

△ [15p-A408-3] Relationship between film density and carbon bonding in DLC films using high frequency HiPIMS method

▲