[15p-A408-1~14] 6.2 Carbon-based thin films

△ [15p-A408-3] Relationship between film density and carbon bonding in DLC films using high frequency HiPIMS method

〇(DC)Hiroyuki Fukue¹, Tatsuyuki Nakatani¹, Tadayuki Okano², Masahide Kuroiwa², Shinsuke Kunitsugu³, Susumu Takabayashi⁴, Hiroki Oota⁵, Ken Yonezawa^5,1 (1.Okayama Univ. of Sci., 2.Tokyo Electronics Co., Ltd., 3.Ind. Technol. Cent. Okayama Pref., 4.National Inst. Technol., Ariake College, 5.Kenix Corporation)

Keywords:diamond-like carbon, Raman spectroscopy

We have been developing a new HiPIMS (High-Power Impulse Magnetron Sputtering) method, HF (High Frequency)-HiPIMS power supply, for further functionalization of thin films. In this study, we report on the relationship between film density and carbon bonding in DLC (Diamond-Like Carbon) films using this HF-HiPIMS method. Carbon bonding was measured by Raman spectroscopy, and five waveforms were separated by Voigt functions. A D-band decreased with increasing film density. Thus, the increase in film density suggests that the incident ions are strong.